News

REVASUM (ASX:RVS) secures LOI to purchase a 6EZ CMP system from SENIC, a leading S. Korean SiC substrate mfg company The recent release of the 6EZ's 200mm conversion kit will enable the tool to ...
The 6EZ has already proven its value in high-volume manufacturing of 150mm SiC substrates and a 200mm conversion kit has now been ... The 6EZ is the first single wafer CMP tool designed from ...