PVD techniques, such as sputtering and thermal evaporation, involve the physical vaporization of a target material and its subsequent condensation onto a substrate to form a thin film. PVD methods ...
Various thin-film deposition tools, including PVD (e-beam & thermal evaporators, DC & RF magnetron (reactive) sputterers) and CVD (APCVD of graphene, Si oxidation, PECVD of SiO2 and SiNx). Available ...
Some results have been hidden because they may be inaccessible to you
Show inaccessible results
Feedback