Lithography for the 65-nm and 45-nm technology nodes is moving forward on a number of fronts, including 193-nm (ArF) immersion technology, the associated issues of hyper-NA optics, and 157-nm (F2) ...

Advanced Semiconductor Device Lithography – what is going to happen next ? The noise and hype level around lithography these days is rather loud. At SPIE’s Advanced Lithography conference this year, a ...

Not long ago, ASM Lithography called together 10 of its key U.S. customers and delivered what amounted to an ultimatum: The Dutch lithography vendor needed six firm purchase orders for 157-nanometer ...

silicon wafer (pre-treated) into the device. 3: The device uses a combination of extreme ultraviolet (EUV) light and mirrors to transfer the design on a photomask onto a wafer. 4: The same pattern is ...

Lithography, based on conventional ink-printing processes, is a technique for patterning a variety of layers, such as conductors, semiconductors, or dielectrics, on a surface. Nanopatterning stretches ...

Commerce Department wants equity in xLight as it backs a free-electron laser to challenge ASML The US Department of Commerce ...

Semiconductor Engineering sat down to discuss lithography and photomask technologies with Greg McIntyre, director of the Advanced Patterning Department at Imec; Harry Levinson, senior fellow and ...

Over the past few years we’ve seen several impressive projects where people try to manufacture integrated circuits using hobbyist tools. One of the most complex parts of this process is lithography: ...

A review of the literature behind quantum lithography, combined with results from a recent but unrelated experiment, shows that quantum lithography is unlikely to work well. A review of the literature ...

Four of the largest semiconductor companies are planning to move to ASML's EUV lithography technology in the next two years. Customers of EUV will be able to manufacture chips with a significantly ...

Intel plans to do 22 nm in 2011. EUV will not be ready for volume production in 2011. Maybe a year later, in 2012 and Intel won’t wait for it. Intel intends to extend 193 nm immersion lithography with ...