Nearly 10 years ago, the industry rolled out a potentially disruptive technique called inverse lithography technology (ILT). But ILT was ahead of its time, causing the industry to push out the ...

Advanced Semiconductor Device Lithography – what is going to happen next ? The noise and hype level around lithography these days is rather loud. At SPIE’s Advanced Lithography conference this year, a ...

silicon wafer (pre-treated) into the device. 3: The device uses a combination of extreme ultraviolet (EUV) light and mirrors to transfer the design on a photomask onto a wafer. 4: The same pattern is ...

Not long ago, ASM Lithography called together 10 of its key U.S. customers and delivered what amounted to an ultimatum: The Dutch lithography vendor needed six firm purchase orders for 157-nanometer ...

Lithography, based on conventional ink-printing processes, is a technique for patterning a variety of layers, such as conductors, semiconductors, or dielectrics, on a surface. Nanopatterning stretches ...

Over the past few years we’ve seen several impressive projects where people try to manufacture integrated circuits using hobbyist tools. One of the most complex parts of this process is lithography: ...

PEBBLE BEACH, Calif. — Leading lithography suppliers this week outlined their exposure tool strategies for the next decade, but vendors face some tough and costly decisions in developing systems for ...

A review of the literature behind quantum lithography, combined with results from a recent but unrelated experiment, shows that quantum lithography is unlikely to work well. A review of the literature ...

Extreme Ultraviolet Lithography (EUV) has been in development for decades. As we detailed last year, the technique is viewed as essential for the future of semiconductor scaling -- and the economics ...

Intel plans to do 22 nm in 2011. EUV will not be ready for volume production in 2011. Maybe a year later, in 2012 and Intel won’t wait for it. Intel intends to extend 193 nm immersion lithography with ...

TimesMachine is an exclusive benefit for home delivery and digital subscribers. About the Archive This is a digitized version of an article from The Times’s print archive, before the start of online ...