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Beta-Phase Gallium Oxide Films Using Plasma-Enhanced Atomic Layer Deposition (PEALD) at 200°CImage Credit: OkyayTech ALD Get access to the full paper By utilizing triethylgallium (TEG) and Ar/Oâ‚‚ plasma, the research demonstrates the growth of high-quality gallium oxide on silicon ...
We recently demonstrated world-record RF power added efficiency of 12%, drain efficiency of 22.4%, output power density of 0.13 W/mm, and maximum gain up to 4.8 dB at 1 GHz for a 2 μm gate length ...
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