Institute of Physical Chemistry & Center for Materials Research, Justus-Liebig-University Giessen, Heinrich-Buff-Ring 17, D-35392 Giessen, Germany Article Views are the COUNTER-compliant sum of full ...

Abstract: We provide an overview on the underlying physical mechanisms associated with the fluorine plasma ion implantation technology that provides a robust approach to fabricating GaN normally-off ...

School of Environmental and Chemical Engineering, Shanghai University, 99 Shangda Road, Shanghai 200444, P. R. China ...