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A new technical paper titled “Graphite Pellicle: Physical Shield for Next-Generation EUV Lithography Technology” was published by researchers at University of Ottawa, Sungkyunkwan University, and ...

Department of Chemistry and the Hong Kong Branch of Chinese National Engineering Research Centre for Tissue Restoration & Reconstruction, The Hong Kong University of Science and Technology, Clear ...

At the same time, the pellicle landscape for extreme ultraviolet (EUV) lithography is changing. ASML, the sole supplier of EUV pellicles, is transferring the assembly and distribution of these ...