† Department of Chemistry and Pharmacy, Inorganic Chemistry, Friedrich-Alexander University of Erlangen-Nuremberg, Egerlandstrasse 1, Erlangen, Germany ‡ Department of Chemistry and Chemical Biology, ...

Find more information on the Altmetric Attention Score and how the score is calculated. The traditional form of carbon nitride materials poses limitations, particularly in catalysis, due to a limited ...

Abstract: Since the 90-nm CMOS technology node, the strained nitride capping layer (i.e., the contact etch stop layer, CESL) is used as a stress-engineering booster that enables transistor improvement ...